Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
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| Format: | eBook |
| Language: | English |
| Published: |
Washington, D.C. :
American Chemical Society,
1983
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| Series: | ACS symposium series
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| Genre/form: | elektronické knihy |
| ISBN: | 9780841210400 0841210403 0841207755 9780841207752 |
| Online Access: | Plný text |
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