Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement, and phenomena
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| Předchozí název: | Journal of vacuum science & technology. B, Microelectronics processing and phenomena |
|---|---|
| Médium: | Časopis |
| Jazyk: | angličtina |
| Vydáno: |
New York :
American Institute of Physics,
1991
|
| Žánr/forma: | časopisy |
| ISSN: | 1071-1023 1520-8567 1071-8028 |
| Témata: | |
| Tagy: |
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| 210 | 1 | |a J. vac. sci. technol., B, Microelectron. nanometerstruct. process. meas. phenom. | |
| 222 | 0 | |a Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena | |
| 245 | 0 | 0 | |a Journal of vacuum science & technology. |n B, |p Microelectronics and nanometer structures processing, measurement, and phenomena |
| 246 | 1 | 3 | |a Journal of vacuum science and technology. B, Microelectronics and nanometer structures processing, measurement, and phenomena |
| 246 | 1 | 0 | |a Microelectronics and nanometer structures processing, measurement, and phenomena |
| 264 | 1 | |a New York : |b American Institute of Physics, |c 1991- | |
| 300 | |a svazky | ||
| 310 | |a 6x ročně | ||
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| 362 | 0 | |a Vol. 9, no. 1 (1991)- | |
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| 776 | 0 | |t Journal of vacuum science & technology. B, Microelectronics and nanometer structures |x 1520-8567 |c (on-line) | |
| 776 | 0 | |t JVST. A & B |x 1071-8028 |c (CD-ROM) | |
| 780 | 0 | 0 | |t Journal of vacuum science & technology. B, Microelectronics processing and phenomena |x 0734-211X |
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