thin films 281 nanotechnology 42 surface physics 38 coatings 32 plasma physics 25 surface treatment of materials 24 material engineering 23 more ... plasma 22 nanostructured materials 19 plasma polymerization 14 phase interfaces 13 semiconductors 13 polymers 13 chemistry 11 lasers 10 polymerization 10 nanostructures 9 oxides 9 tribology 9 physical chemistry 8 solid state physics 7 magnetism 7 microelectronics 7 nanocomposites 7 optical materials 7 coating 7 surface 7 ferroelectric substances 6 catalysis 6 sputtering 6 less ...