Mechanics of microsystems

Bibliographic Details

Main Author:	Corigliano, Alberto, 1963- (Author)
Other Authors:	Ardito, Raffaele (Author)  Comi, Claudia, 1963- (Author)  Frangi, Attilio, 1969- (Author)  Ghisi, Aldo, 1973- (Author)  Mariani, Stefano, 1969- (Author)
Format:	Book
Language:	English
Published:	Hoboken, NJ : Wiley, 2018
Series:	Wiley microsystem and nanotechnology series
Genre/form:	kolektivní monografie
ISBN:	978-1-119-05383-5 9781119053804 9781119053811
Subjects:	mikroelektronické technologie technická mechanika dynamika nanotechnologie mikroelektromechanické systémy MEMS kinetika
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