Growth and transport in nanostructured materials : reactive transport in PVD, CVD, and ALD

This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...

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Bibliographic Details

Main Author:	Yanguas-Gil, Angel (Author)
Corporate Author:	SpringerLink (online služba) (Distributor)
Format:	eBook
Language:	English
Published:	Cham : Springer, 2017
Series:	SpringerBriefs in materials
Genre/form:	monografie elektronické knihy
ISBN:	978-3-319-24672-7 978-3-319-24670-3
Subjects:	materiálové inženýrství tenké vrstvy nanostrukturní materiály fyzika povrchů
Online Access:	Plný text
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