Microelectronics processing : chemical engineering aspects
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|---|---|
| Korporace: | |
| Médium: | E-kniha |
| Jazyk: | angličtina |
| Vydáno: |
Washington, DC :
American Chemical Society,
1989
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| Edice: | Advances in chemistry series
|
| Žánr/forma: | elektronické knihy |
| ISBN: | 9780841224032 084122403X 0841214751 9780841214750 |
| On-line přístup: | Plný text |
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| 008 | 091008s1989 xxuaf 101 0 eng d | ||
| 020 | |a 9780841224032 |q (elektronická kniha) | ||
| 020 | |a 084122403X |q (elektronická kniha) | ||
| 020 | |z 0841214751 | ||
| 020 | |z 9780841214750 | ||
| 035 | |a (OCoLC)454323624 |z (OCoLC)297904648 | ||
| 040 | |d ABD025 |a MUU |b cze |c MUU |d OCLCE | ||
| 050 | 4 | |a TK7874 |b .M53 1989 | |
| 080 | |a 0.034.2:08 |2 MRF | ||
| 245 | 0 | 0 | |a Microelectronics processing : |b chemical engineering aspects / |c Dennis W. Hess, editor, Klavs F. Jensen, editor |
| 260 | |a Washington, DC : |b American Chemical Society, |c c1989 | ||
| 300 | |a 1 online zdroj (xiv, 547 s.) : |b il. | ||
| 490 | 1 | |a Advances in chemistry series ; |v 221 | |
| 500 | |a Title from PDF title page (ACS publications, viewed Oct 7, 2009) | ||
| 504 | |a Obsahuje bibliografie | ||
| 659 | 0 | |a Microelectronics |x Materials | |
| 659 | 0 | |a Integrated circuits |x Design and construction | |
| 659 | 0 | |a Surface chemistry | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 700 | 1 | |a Hess, Dennis W | |
| 700 | 1 | |a Jensen, Klavs F., |d 1952- | |
| 776 | 0 | 8 | |i Tištěná verze: |t Microelectronics processing. |d Washington, DC : American Chemical Society, c1989 |z 0841214751 |w (DLC) 89006862 |w (OCoLC)19623575 |
| 710 | 2 | |a American Chemical Society |7 ko2002148933 |4 dst | |
| 830 | 0 | |a Advances in chemistry series | |
| 856 | 4 | 0 | |u https://doi.org/10.1021/ba-1989-0221 |y Plný text |
| 910 | |a ABD025 | ||
| 950 | |a ACS |b eBooks 2009 | ||