Thin film materials technology : sputtering of compound materials

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Bibliographic Details
Main Author: Wasa, Kiyotaka, 1937-  
Other Authors: Kitabatake, Makoto, 1956-  
Adachi, Hideaki  
Format: Book
Language:English
Published: Norwich : Heidelberg : Andrew ; Springer, 2004
Genre/form:monografie
ISBN:0-8155-1483-2
3-540-21118-7
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Cover Image
Status Sublibrary Description Location LCC Call number Old Call number
Regular loan NTK collection 4th floor, shelf 4B/016 TA418 .9 .T45 W37 2004 A 40422